This invention concerns an ellipsometer for the examination of a sample whereby
the ellipsometer has a broadband light source on the emitter side and a detector
on the receiver side for a receiver light beam reflected from the sample. A refractive
optic for the generation of a measuring spot on the sample and an aperture arranged
on the emitter side for the definition of a measuring spot on the sample. The spectroscopic
ellipsometer of the present invention makes it possible to easily produce a precisely
defined measuring spot on the sample.
