A multi-chamber system includes an index station at which one or more
substrate cassettes are placed, a transfer passageway having one end
adjacent the index station, at least one process chamber disposed
alongside the transfer passageway, and at least one substrate transfer
robot disposed in the transfer passageway for receiving a substrate from
the index station and by which the substrate is transferred to each
process chamber. The multi-chamber system has a minimal footprint.
Furthermore, the system can be easily expanded. In addition, the
substrate transfer robot(s) may have a blade including two substrate
supports so that the time required for moving a substrate through the
system is minimized.
