A susceptor connection system and an associated apparatus and method are provided.
The susceptor connection system includes at least one shoe that can be urged against
a peripheral edge portion of the susceptors by a compression device. In this regard,
each shoe can urge the edge portions of the susceptors together to achieve electrical
contact therebetween, e.g., so that an induced current can flow between the susceptors
to heat the susceptors and a workpiece. In addition, each shoe can define a passage
for circulating a coolant to cool the edge portions and thereby reduce the oxidation
and contact resistance between the susceptors.
