An optical micro-electro-mechanical system (MEMS) switch is disclosed. In a preferred
embodiment the optical MEMS switch is used as an MN optical signal switching
system. The optical MEMS switch comprises a plurality of optical waveguides formed
on a cantilever beam platform for switching optical states wherein the state of
the optical switch is changed by a system of drive and latch actuators. The optical
MEMS device utilizes a latching mechanism in association with a thermal drive actuator
for aligning the cantilever beam platform. In use the optical MEMS device may be
integrated with other optical components to form planar light circuits (PLCs).
When switches and PLCs are integrated together on a silicon chip, compact higher
functionality devices, such as Reconfigurable Optical Add-Drop Multiplexers (ROADMs),
may be fabricated.
