A piezoelectric element includes: a piezoelectric film made of PZT; a pair of
electrodes
(a lower electrode and an upper electrode) arranged with the piezoelectric film
being interposed therebetween; and a base film made of PLT having a thickness of
about 50 nm to 200 nm and provided between the piezoelectric film and the lower
electrode. The piezoelectric element, as a whole, is provided on a substrate, which
may be a stainless steel substrate (polycrystalline), a heat-resistant glass substrate
(amorphous), a silicon substrate (single crystal), etc. A piezoelectric element
having a good piezoelectric characteristic can be provided on a substrate other
than a single crystal substrate.
