In a method of cleaning and refurbishing a process chamber component having a
metal coating having a surface thereon, the surface of the metal coating is immersed
in an acidic solution to remove at least a portion of the process deposits from
the surface. Thereafter, the surface of the metal coating is immersed in a basic
solution to remove substantially all the metal coating. The component may optionally
be bead blasting to roughen a surface of the component, and the metal coating may
be re-formed.
