Robotic reticle manipulators are disclosed for use in holding and conveying,
with good stability, thin, circular reticles as used in charged-particle-beam microlithography.
A manipulator embodiment includes at least one arm configured for executing movements
in the X-, Y-, and Z-directions. Connected distally to the at least one arm is
a U-shaped fork (as an exemplary reticle-support member) defining recessed surfaces
and vacuum ports for holding the reticle at the reticle's narrow handling zone
located along the periphery of the reticle. Each vacuum port includes an upwardly
extending lip that defines, on its "upward"-facing surface, a respective reticle-contact
surface. Three such vacuum ports are provided on the fork and are nearly equidistantly
separated from one another. Thus, as the reticle is being held and conveyed by
the manipulator, the reticle is securely held to prevent reticle damage.
