An optical switch device includes a rolling shutter or membrane attached at one
of its edges to a substrate near an optical port in the substrate. The rolling
shutter can assume one of two states. In a first closed state, the membrane is
uncoiled onto the substrate over the port such that light directed at the port
impinges on the shutter. In a second open state, the membrane is rolled up away
from the port such that light directed at the port impinges on the port. In one
embodiment, a mirror is formed on the membrane such that when the membrane is in
the closed state over the substrate, light directed at the port is reflected by
the mirror. In one configuration, the optical port includes a hole or aperture
such light passed through the port without interference. The device can include
a latch electrode the far end of the membrane such that when it is rolled out,
it can be held in position by a latching voltage applied across the latch electrode
and the substrate. Slits can be formed in the membrane to keep the mirror flat
by relieving strain in the membrane and to allow gases in proximity to the device
to pass through the membrane as it is activated. The shutter can include dimples
to minimize the area of contact between the membrane and the substrate to reduce
the probability of the two sticking together. The attachment edge of the membrane
can be made shorter than its width to reduce distortions in the membrane to keep
the mirror flat. A raised annular rim can be provided around the port such that
when the shutter is held down over the port it is pulled taut and flat over the
rim. This feature is also used to maintain flatness in the mirror. The switch device
can be used as part of an array of optical switches.
