A remote track editor system, method, and computer readable medium is provided
to remotely edit track flows and recipes of semiconductor processing tools. The
editor system includes a processing track, a track controller, and a remote track
editor for remotely editing recipes of at least one semiconductor processing tool.
The editor system communicates with remote terminals and accesses multiple flows
and recipes stored on network databases through a SECS/GEM interface. The remote
track editor edits recipes without interrupting the process track and correctly
renumbers line and flow numbers of the recipes when editing, deleting, or inserting
steps. The remote track editor also performs side-by-side comparisons of multiple
recipes, verifies the contents of recipes to master recipes, and provides indicators
of mismatches.
