A method for diagnosing failure of a manufacturing apparatus, includes: measuring
time series data of characteristics of a reference apparatus which conducts same
processes as the manufacturing apparatus, and recording the time series data of
the characteristics in a system information storage unit as a system information
database; reading out a recipe listed in a process control information database
recorded in a process control information storage unit; driving and controlling
the manufacturing apparatus, measuring time series data of the characteristics
as test data, and outputting the test data in real time, in accordance with the
recipe; performing calculations on the test data, and creating failure diagnosis
data; and diagnosing the failure of the manufacturing apparatus using the failure
diagnosis data and the system information database.
