The present invention provides a method for in-situ real-time monitoring of mold
deformation by using a database to store temporary information during the following
steps: (a) providing a mark on the mold body that is easy to observe in order to
monitor the mold deformation, (b) installing a signal source and a monitor device
for monitoring the deformation quantity on the mold, (c) transforming the above
deformation quantity into computer signals for storing in the database and (d)
issuing controlling or warning signals to the imprinting machine based on the processing
results of the stored information in the database.