A pixel portion 100 of a liquid crystal display device includes a thin
film
transistor T including a gate electrode 13, a gate insulating film 16,
a channel region 18, and source/drain regions 22, a source line (data)
26 for supplying current to the thin film transistor T and a pixel electrode
24. In the formation of a pixel circuit 100, a gate electrode 13,
a gate insulating film 16, and the channel region 18 are firstly
formed on a glass substrate 10. After the formation of the channel region
18 and the like, a polyimide film 20 surrounding the peripheries
of the regions to be provide with the source/drain regions 22, the pixel
electrode 24 and the source line 26 on a glass substrate 10 is
formed. The regions surrounded with the wall of the polyimide film 20 are
applied with a liquid material and subjected to a thermal treatment, thereby forming
the element of the source/drain regions 22 and the like.
