An optical switch device includes at least an optical switch element and driving
control circuit. In the optical switch element, a fixed electrode portion is arranged,
via a dielectric layer, on a semiconductor substrate on which an integrated circuit
is formed. A mirror structure has a plate-shaped movable portion arranged above
the fixed electrode portion while opposing the fixed electrode portion. A reflecting
portion is formed at least at part of the movable portion to reflect light. A support
member is fixed around the fixed electrode portion on the semiconductor substrate
via a dielectric layer and supports the mirror structure. The driving control circuit
is incorporated in the integrated circuit to drive the optical switch element by
applying a predetermined potential to the movable portion and fixed electrode portion.
