A method of printing a gate pattern on a substrate comprising the steps of: identifying
at least one area in the pattern in which one of the gate features overlays one
of the active regions; reducing a width dimension of the one of the gate features
at the location which the one of the gate features overlays the one of the active
regions; extracting the gate features from the pattern; decomposing the gate features
into a vertical component mask and a horizontal component mask; and illuminating
the vertical component mask and the horizontal component mask utilizing dipole illumination.
