The present invention relates to polyalkylene oxide porogens having hyper-branches
and low dielectric-constant insulators using them. More particularly, the present
invention relates to polyalkylene oxide porogens having hyper-branches expressed
by the following formula (1), where the polyalkylene oxide porogen has a center
molecular (D) having branches (W), and low dielectric-constant insulators having
nanopores prepared by coating a mixture of the porogen and a high heat-resistant
resin such as polysilsesquioxane and thermal treating the coated substrate at a
temperature effective to degrade the porogen.
