A three dimensional inspection method for inspecting ball array devices having
a plurality of balls, where the ball array device is positioned in an optical system.
The inspection method includes the steps of illuminating at least one ball on the
ball array device, and disposing a sensor, a first optical element and a second
optical element in relation to the ball array device so that the sensor obtains
at least two differing views of the at least one ball, the sensor providing an
output representing the at least two differing views. The output is processed using
a triangulation method to calculate a three dimensional position of the at least
one ball with reference to a pre-calculated calibration plane.
