A MEMs mirror device comprises a mirror layer, a frame structure, and an actuator
layer. At least one mirror is movably coupled to the frame. The actuator layer
includes at least one conductive path for moving the mirror. In accordance with
the invention, the mirror is curved for efficiently directing and focusing reflected
light. The mirror comprises a metal-coated base, and curvature can be achieved
by doping selected regions of the base or by using coating/base combinations with
sufficient mismatch that they be curved by differential thermal expansion. The
resulting MEMs devices are advantageous for optical switching, variable attenuation
and power gain equalization.
