An ion beam milling system and method for electron microscopy specimen preparation
is provided and is useful for the preparation for analysis by either TEM or SEM
of semiconductors, metals, alloys, ceramics, and other inorganic materials. In
one embodiment, a system and process are provided for the preparation of specimens
for analysis by transmission electron microscopy including a specimen processing
chamber, at least two ion beam generators, and a specimen support or holder. An
ion beam masking member is secured to a surface of the specimen and the specimen
is milled. Preferably, the system also includes the ability to view the progress
of the milling operation and may include an imaging device such as a light microscope
which permits monitoring of the area of interest on a specimen as the specimen
is milled.
