A Micro-Electro-Mechanical Systems (MEMS) actuator employs electrostatic comb
electrodes
to position optical elements along multiple axes. In one embodiment, an actuator
assembly includes an actuator support, typically a silicon wafer, supporting a
fixed comb with a plurality of teeth. A frame flexibly connected to the actuator
support includes a complementary set of movable comb electrodes, the teeth of which
are arranged interdigitally with the teeth of the fixed combs. The frame can be
tilted with respect to the actuator support along a first fulcrum axis by applying
a potential difference between the fixed and movable combs. Each actuator assembly
also includes an actuated member, a mirror mount in one embodiment, flexibly connected
to the frame. The actuated member and the frame include electrical isolated, interdigitated,
combs. The actuated member can be moved relative to the frame along a second fulcrum
axis by applying a potential between these interdigitated combs. A bonding process
for fabrication of an array of actuators is described.
