Disclosed is a case where an aligning method according to the present invention
is applied to a probe apparatus. Target probes are photographed by an upper CCD
camera and target electrode pads are photographed by a lower CCD camera. Second
virtual images of the photographed probes and first virtual images of the electrode
pads are displayed in second and first image data areas on a monitor screen. Dark
and light colors in terms of brightness are applied to pixels of the second virtual
image and the first virtual image. The second virtual images are moved on the monitor
screen, so that the second virtual images are superimposed on the first virtual
images. The total sum of the brightness (luminance) of all the first virtual images
is calculated. On the basis of the calculated luminance value, a position where
the target probes are most successfully brought into contact with the target pads
is detected.