There is disclosed a heating apparatus with electrostatic attraction function
1, comprising at least a supporting base 2, an electrode for electrostatic
attraction 4 and a heating layer 5 that are formed on the supporting
base, and an insulating layer 6 that is formed on the electrode for electrostatic
attraction and the heating layer, wherein the electrode for electrostatic attraction
and/or the heating layer are/is composed of pyrolytic graphite containing boron
and/or boron carbide of 0.001-30% by weight in terms of boron concentration, and
the insulating layer has an electric resistivity of 106-1015 cm.
There is provided a heating apparatus with electrostatic attraction function, which
has a high thermal shock resistance, no problem of delamination, a proper resistance
value, and a sufficient electrostatic attraction force even in a medium and high
temperature range of 500-800 C., which causes no breakage of devices due
to leakage current, and which can be used stably during rapid rise and rapid drop
in temperature.
