In an aspect, an apparatus is provided that sets and reprograms the state of
programmable
devices. In an aspect, a method is provided such that an opening is formed through
a dielectric exposing a contact, the contact formed on a substrate. An electrode
is conformally deposited on a wall of the dielectric, utilizing atomic layer deposition
(ALD). A programmable material is formed on the electrode and a conductor is formed
to the programmable material. In an aspect, a barrier is conformally deposited
utilizing ALD, between the electrode and the programmable material.
