Adjustment of threshold voltages of selected NMOS and PMOS transistors using fewer masking steps

   
   

A method is provided for processing a semiconductor topography. In particular, a method is provided for decreasing the threshold voltage magnitude of a first transistor being formed within the substrate while simultaneously increasing the threshold voltage magnitude of a second transistor being formed within the substrate. In some embodiments, a width of the first transistor may be larger than a width of the second transistor. In addition or alternatively, the method may include performing a first implantation corresponding to a threshold voltage magnitude above a desired value for the first transistor. The method may further include performing a second implantation to simultaneously lower the threshold voltage magnitude of the first transistor and raise a threshold voltage magnitude of the second transistor. In some embodiments, the method may include introducing dopants of a first conductivity type into a first transistor channel dopant region and a second transistor channel dopant region simultaneously.

 
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