Silicone resins comprising 5 to 50 mole % of (PhSiO3-x)/2(OH)x)
units and 50 to 95 mole % (HSiO(3-x)/2(OH)x), where Ph is
a phenyl group, x has a value of 0, 1 or 2 and wherein the cured silicone resin
has a critical surface free energy of 30 dynes/cm or higher. These resins are useful
as etch stop layers for organic dielectric materials having a critical surface
free energy of 40 dynes/cm or higher.