X- and y-axis moving mechanisms are provided for positioning a sample table in
the x-axis and the y-axis directions. A yT-axis moving mechanism for moving those
moving mechanisms in a direction along a tilting direction of a X-ray camera is
provided separately from the x- and y-axes moving mechanisms. When the X-ray camera
is tilted, the sample table is moved by the yt axis moving mechanism and a z-axis
moving mechanism, whereby a viewpoint of the sample and a fluoroscopic magnification
factor set before the X-ray camera is tilted are left unchanged. The coordinates
on the sample table by the moving mechanisms before the X-ray camera is tilted
can be used as they are even after the camera is tilted.
