Apparatus are provided for fatigue testing ferroelectric material in a
wafer, including an on-chip oscillator to provide a bipolar waveform to a ferroelectric
capacitor formed in the wafer, as well as a switching system to selectively provide
external access to the ferroelectric capacitor. Test methods are also provided,
including measuring a performance characteristic of a ferroelectric capacitor in
the wafer, providing a bipolar waveform to the ferroelectric capacitor for a number
of cycles using an on-chip oscillator, and again measuring the performance characteristic
after an integer number of cycles of the bipolar waveform.
