A method for preventing contamination, oxidation and gas absorption of reactive
materials, and articles formed thereby. The method generally entails depositing
a first layer of a reactive material and a second layer of a substantially nonreactive
material so that the second layer protects the first layer from a surrounding atmosphere.
For example, the first and second layers may be deposited to form a film on a surface
within a chamber that is desired to be maintained in a vacuum during use of the
article. The second layer is sufficiently thin such that appropriately heating
the first and second layers causes the reactive material of the first layer to
become interdiffused with the nonreactive material of the second layer, to the
extent that at least a portion of the reactive material is able to react and getter
gases from the surrounding atmosphere.
