An electron beam apparatus including a hermetic container provided with an electron
source, in which, when a first member is arranged in the hermetic container, at
least part of the first member is coated with a film, and the film is configured
in such a manner that it includes two regions, a first region and a second region
different in electron density from the first region and the second region forms
a network in the first region. This three-dimensional network structure allows
a member being charged to be preferably controlled. Thereby, it is possible to
control the effects of a member being charged which is used in an electron beam apparatus.
