A method and system for determining dimensions of optically recognizable features
provides a low-cost and efficient high speed/high resolution measurement system
for determining surface feature dimensions. Multiple imaging subsystems are arranged
at predetermined differing angles above a surface under test. A scanning subsystem
moves either the imaging subsystems or the surface under test and a processor coupled
to the imaging subsystems determines the height of a surface feature by determining
the deviations between the outputs of the imaging systems as an edge of the surface
feature passes within the optical paths of the imaging subsystems.
