Polyimide precursors contained in resin compositions of the present invention
have a polymer structure unit represented by formula (1) below:
##STR1##
wherein chemical structure A2 includes an alicyclic compound but
not an aromatic compound such as a benzene ring so that they provide excellent
light transmission over a wide wavelength range. The polyimide precursors are imidized
at 7.5% or more and 36% or less so that they are less soluble in developing solutions
and therefore are not dissolved in the developing solutions at unexposed parts.
Thus, the resin compositions of the present invention can be used to form a resin
film having a precise pattern by exposure and development.
