The invention relates to a biosensor matrix comprising a substrate made of semiconductor
material. It has a main plane surface and cavities formed in a surface opposite
from said plane surface to define between the bottoms of said cavities and the
main plane surface deformable structure each including at least one piezoresistive
or piezoelectric sensing element. The method of manufacture implements fabrication
techniques specific to micro- and nanotechnologies, preferably with localized pre-amorphization
of the surface of the substrate prior to implantation of piezoelectric elements,
which implantation is followed by annealing.