An exposure apparatus has a mask stage (9), a prealignment device (7)
which prealigns a mask (1) to be transferred to the stage (9), and
a manipulating mechanism (10) which transports a master or exchanges two
masters between the stage (9) and prealignment device (7). A master
transport apparatus (30) includes a mask transport mechanism (8)
which holds the mask (1) with holding portions (8a, 8b)
that can hold at least two masks (1) and transports the master (1),
and a controller (11) which controls the transport mechanism (8).
The controller (11) controls the transport mechanism (8) such that,
when a mask (1) that should be used in a first turn for exposure is to be
mounted on the stage (9), a mask (1) to be used in a second turn
is provided to the prealignment device (7), and a mask (1) to be
used in a third turn is held by the holding portion (8a, 8b).