An exposure apparatus has a mask stage (9), a prealignment device (7) which prealigns a mask (1) to be transferred to the stage (9), and a manipulating mechanism (10) which transports a master or exchanges two masters between the stage (9) and prealignment device (7). A master transport apparatus (30) includes a mask transport mechanism (8) which holds the mask (1) with holding portions (8a, 8b) that can hold at least two masks (1) and transports the master (1), and a controller (11) which controls the transport mechanism (8). The controller (11) controls the transport mechanism (8) such that, when a mask (1) that should be used in a first turn for exposure is to be mounted on the stage (9), a mask (1) to be used in a second turn is provided to the prealignment device (7), and a mask (1) to be used in a third turn is held by the holding portion (8a, 8b).

 
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