A semiconductor component having a monitoring structure suitable for monitoring
metal migration of a metallization system and a method for manufacturing the semiconductor
component. A semiconductor substrate is provided having a major surface. A first
extrusion monitoring element is formed over the major surface. A notched test element
is formed over the first extrusion monitoring element. A second extrusion monitoring
element is formed over the notched test element. A current is conducted through
the notched test element. The resistance between the notched test element and at
least one of the first and second extrusion monitoring elements is monitored to
determine if a short has been created.