An optical projection lens system for microlithography comprising in the direction
of propagating radiation: a first lens group having positive refractive power,
a second lens group having negative refractive power and comprising a waist (constriction)
with a minimum diameter of the propagating radiation, and a further lens arrangement
with positive refractive power, which follows the second lens group, wherein at
least one lens of the projection lens system which is arranged in front of the
waist comprises an aspherical surface.