A memory cell array is provided that includes ferroelectric capacitors with enhanced
characteristics, a method of making the same, and a ferroelectric memory device
including the memory cell.
In a memory cell array, memory cells including ferroelectric capacitors are arrayed
in a matrix. Each ferroelectric capacitor includes a lower electrode, an upper
electrode, and a ferroelectric section disposed between the lower electrode and
the upper electrode. The ferroelectric section is disposed in an intersection between
the lower electrode and the upper electrode. An intermediate electrode is disposed
between the ferroelectric section 14 and the upper electrode.