A multi-layered unit according to the present invention includes a support substrate
formed of a material which has conductivity and on which a dielectric material
containing a bismuth layer structured compound can be epitaxially grown, at least
the surface thereof being oriented in the [001] direction, and a dielectric layer
formed by epitaxially growing a dielectric material containing a bismuth layer
structured compound on the support substrate and formed of a dielectric material
containing a bismuth layer structured compound oriented in the [001] direction.
Since the thus constituted multi-layered unit includes the dielectric layer containing
a bismuth layer structured compound oriented in the c axis direction, in the case
of, for example, providing an upper electrode on the dielectric layer to form a
thin film capacitor and applying a voltage between the electrode layer and the
upper electrode, the direction of the electric field substantially coincides with
the c axis of the bismuth layer structured compound contained in the dielectric
layer. As a result, since the ferroelectric property of the bismuth layer structured
compound contained in the dielectric layer can be suppressed and the paraelectric
property thereof can be fully exhibited, it is possible to fabricate a thin film
capacitor having a small size, large capacitance and an excellent dielectric characteristic.