A method of manufacturing a semiconductor device with contact bodies that extend
in the direction of bit lines to contact storage nodes includes forming band-type
openings by selectively etching an insulating layer that covers the bit lines.
The band-type openings extend in a lengthwise direction of the gate lines to expose
the first contact pads and have portions that protrude in a lengthwise direction
of the bit lines. The method also includes forming a conductive layer on the insulating
layer that fills the band-type openings and is electrically connected to the first
contact pads. The conductive layer is then patterned to separate the conductive
layer into individual storage node contact bodies that extend in a lengthwise direction
of the bit lines. Storgage nodes are then formed on the storage node contact bodies.