The illustrative embodiment of the present invention is a vertical-mode, free-free
beam resonator, and micromechanical circuits that include one or more such resonators.
In accordance with the illustrative embodiment, the resonator comprises a movable
beam that overlies a drive electrode. The movable beam is supported by a plurality
of supports, the length of which is substantially less than one-quarter of a wavelength
of the resonant frequency of the resonator.