A system and method for processing a workpiece, includes workpiece processors.
A robot is moveable within an enclosure to load and unload workpieces into and
out of the processors. A processor includes an upper rotor having a central air
flow opening. The upper rotor is magnetically driven into engagement with a lower
rotor to form a workpiece processing chamber. A moveable drain mechanism aligns
different drain paths with the processing chamber so that different processing
fluids may be removed from the processing chamber via different drain paths. A
moveable nozzle positioned in the air flow opening distributes processing fluid
to the workpiece. The processing fluid is distributed across the workpiece surface,
via centrifugal force generated by spinning the processing chamber, and removed
from the processing chamber via the moveable drain mechanism.