The invention concerns a color image sensor that can be used to make a miniature
camera, and a corresponding method for making this sensor.
The image sensor comprises a transparent substrate (40) on the upper part
of which are superimposed, successively, a mosaic of color filters (18),
a very thin silicon layer (30) comprising photosensitive zones, and a stack
of conductive layers (14) and insulating layers (16) defining image
detection circuits enabling the collection of the electrical charges generated
by the illumination of the photosensitive zones through the transparent substrate.
The manufacturing method consists in producing the photosensitive circuits on a
silicon wafer, transferring said wafer on to a temporary substrate, thinning the
wafer down to a thickness of about three to 30 micrometers, depositing color filters
on the surface of the remaining silicon layer and transferring the structure to
a permanent transparent substrate and eliminating the temporary substrate.