A piezoelectric/electrostrictive actuator includes a plurality of piezoelectric/electrostrictive
elements arranged in comb teeth-like alignment on a base plate. The actuator is
driven by means of dislocation of the piezoelectric/electrostrictive elements.
The cell driving type actuator is characterized in that each of the cells is formed
independently from adjacent cells by positioning cover plates between two adjacent
piezoelectric/electrostrictive elements. Thus, there is provided a piezoelectric/electrostrictive
actuator wherein a heating process at a high temperature can be applied and mass
production at low cost is possible. The actuator includes cells with slit portions
having a width of 60 m or less and a high aspect ratio and can be activated
with high electric field strength, and great displacement can be obtained with
small electric field strength.