A method and apparatus for the dicing of semiconductor wafers using pressure
to
mechanically separate the individual die from the wafer without the use of a wafer
saw. The method includes forming trenches along the scribe lines on a semiconductor
wafer and then applying a mechanical pressure to the semiconductor wafer. The mechanical
pressure causes a "clean break" of the wafer along the scribe lines, thereby singulating
individual die on the wafer. The apparatus comprises a pad for supporting a semiconductor
wafer and a positioning member to position the semiconductor wafer on the pad.
A pressure mechanism is provided to apply a mechanical pressure to the wafer so
as to singulate the individual die on the wafer.