An electron microscope is provided, which enables an observation with high resolution.
The electron microscope is able to detect the deviation of an electron beam relative
to the opening of a slit quantitatively, thereby shifting the electron beam accurately
to the center of the opening of slit so as to execute energy selection. The electron
microscope has an energy filter control unit for adjusting a relative position
between an electron beam and a slit by shifting the position of electron beam based
on a signal delivered by an energy filter electron beam detector. Also a method
for controlling an energy filter is provided, which includes the steps of shifting
the position of an electron beam, determining the position of electron beam and
letting the electron beam pass through the center of an opening of the slit by
controlling the position of slit or position of electron beam.