An inkjet recording head includes a two-dimensional array of a pressure chambers and corresponding array of piezoelectric elements each for applying a pressure wave to ink in a corresponding pressure chamber. In fabrication, a piezoelectric plate temporarily bonded onto a substrate is subjected to sandblasting to form the plurality of piezoelectric elements After the piezoelectric elements are bonded as a unit onto a diaphragm which constitutes part of the walls of the pressure chambers, the substrate is removed. Dummy patterns equalize the degree of side etching among the piezoelectric elements.