A lithography system for forming geometric patterns on a workpiece is described
herein. The lithography system may include a reflective liquid crystal display
comprising an array of configurable pixels, a radiation source for directing radiation
onto the reflective liquid crystal display, a projection system for reducing a
radiation pattern reflected by the reflective liquid crystal display and projecting
the reduced radiation pattern onto a workpiece, and a stage for holding the workpiece.
The lithography system may be used to form geometric patterns on a substrate during
semiconductor fabrication.