Methods and apparatuses for scanning of optical beams are disclosed. A beam is optically coupled to an optical conduit, and the optical conduit is made to bend. A set of positions of the optical conduit is measured and the optical conduit is bent. The properties of the exiting light beam are determined by the optical conduit and the bending of the optical conduit, thereby scanning the beam.

 
Web www.patentalert.com

< Marking substrates

< Driver observation system

> Functional patterning material for imprint lithography processes

> Method and its apparatus for inspecting particles or defects of a semiconductor device

~ 00204