An electronic module, substrate assembly, and fabrication method, the assembly
providing thermal conduction between an electronic device to be cooled and an aqueous
coolant, while maintaining physical separation between the coolant and electronic
device. The assembly includes a substrate, one or more electronic devices to be
cooled, and a multilayer, impermeable barrier. The multilayer barrier includes
a first layer, providing mechanical support for a second layer. The second, thinner
layer provides an impermeable barrier, and a high effective thermal conductivity
path between an electronic device and a cooling fluid in contact with an upper
surface of the second barrier layer. Mechanical stresses are minimized by appropriate
material selection for the first layer, and a thin second layer. When incorporated
into an electronic module assembly including a module cap, the substrate assembly
provides physical separation between a cooling fluid introduced into the module
cap, and both the substrate and electronic devices.