A first software program for simulating an operating laser system controls a
processor
that generates one or more dummy parameters each corresponding to a parameter of
an operating laser system. The dummy parameter is read over a same or similar signal
interface as the operating laser system by a processor running a test software
subroutine having the laser system parameter as an input. An algorithm including
the test software subroutine then generates an output command based on the value
of the dummy parameter. A second software program for efficiently scheduling laser
service routines based on a predetermined lithography system schedule controls
a processor that reads the lithography system schedule including scheduled system
downtimes, wherein the scheduled downtimes include start times and durations. The
processor then reads a time window and duration for each of one or more scheduled
laser service routines. The processor then determines a start time for each scheduled
laser service routine within the time window of the service routine, wherein the
start times are selected to collectively maximize temporal overlap of the scheduled
laser service routine durations and scheduled system downtime durations. A third
software program including a flow control kernel controls a processor to receive
a unique command from one of multiple external software control programs corresponding
to a function of a laser system and input the unique command to the flow control
kernel. The flow control kernel outputs a generic command that is the same for
each unique input command of the multiple external software control programs corresponding
to the same laser system function. The generic command or command sequence is then
input to a generic control module corresponding to the laser system function.