A method is provided for preventing dopant leaching from a doped structural film
during fabrication of a microelectromechanical system. A microstructure that includes
the doped structural film, sacrificial material, and metallic material is produced
with a combination of deposition, patterning, and etching techniques. The sacrificial
material is dissolved with a release solution that has a substance destructive
to the sacrificial material. This substance also acts as an electrolyte, forming
a galvanic cell with the doped structural film and metallic material acting as
electrodes. The effects of the galvanic cell are suppressed by including a nonionic
detergent mixed in the release solution.