It is an object of the invention to provide a method for manufacturing an IC
chip
wherein a wafer is prevented from being damaged and the ease of handling thereof
is improved so that the wafer can be appropriately processed into IC chips, even
if a thickness of the wafer is extremely reduced to approximately 50 m.
The invention provides a method for manufacturing an IC chip comprising, at least:
the step of securing a wafer to a support plate via a support tape having a surface
layer comprising an adhesive (A) containing a gas generating agent for generating
a gas due to stimulation and a surface layer comprising an adhesive (B); the step
of polishing said wafer with securing said wafer to said support plate via said
support tape; the step of adhering a dicing tape to said polished wafer; the step
of providing said stimulation to said adhesive (A) layer; the step of removing
said support tape from said wafer; and the step of dicing said wafer, which comprises
adhering said surface layer comprising adhesive (A) to said wafer and adhering
said surface layer comprising adhesive (B) to said support plate in the step of
securing said wafer to said support plate via said support tape, providing said
stimulation while uniformly sucking under reduced pressure the entirety of said
wafer from the dicing tape side thereof, and then removing said support tape from
said wafer in the step of providing stimulation to said adhesive (A) layer and
in the step of removing said support tape from said wafer.